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Other Metrology and Inspection

  • Introduction of infrared metrology and inspection

    TZTEK’s infrared system in a leading position globally. The system integrates visible and infrared illumination for effective measurement and inspection of features on the top, bottom and inside of substrate.

    View Details
  • Introduction of framed wafer inspection

    TZTEK’s inspection solution is optimized for sawing process control. Without any special recipe set up, defects such as, scratches, cracks, dirt, die missing and particles, as well as holes, bubbles and waves on the frame and tape could be detected from all areas of a framed wafer.

    View Details

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